Franklin

Proceedings : IEEE micro electro mechanical systems.

Publication:
New York, N.Y. : Institute of Electrical and Electronics Engineers,
Format/Description:
Conference/Event
Journal/Periodical
v. : ill. ; 28 cm.
Annual
Began with 1st in 1988?
-11th (1998).
Conference Name:
IEEE Workshop on Micro Electro Mechanical Systems.
Status/Location:
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Details

Other Title:
IEEE micro electro mechanical systems
Micro electro mechanical systems
MEMS
Continued By:
IEEE International Conference on Micro Electro Mechanical Systems. Technical digest
Subjects:
Electromechanical devices -- Congresses.
Microelectronics -- Congresses.
Microelectromechanical systems -- Congresses.
Notes:
Description based on: 3rd (1990).
"An investigation of micro structures, sensors, actuators, machines and robots."
Workshop for <1990-> sponsored by the IEEE Robotics and Automation Society and in cooperation with the ASME Dynamic Systems and Control Division.
Contributor:
IEEE Robotics and Automation Society.
American Society of Mechanical Engineers. Dynamic Systems and Control Division.
OCLC:
173705327