VLSI metallization : physics and technologies / Krishna Shenai, editor.
- Publication:
- Boston : Artech House, c1991.
- Format/Description:
- Book
x, 529 p. : ill. ; 28 cm. - Series:
- Artech House materials science library
The Artech House materials science library - Status/Location:
-
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Details
- Subjects:
- Electric contacts.
Semiconductor-metal boundaries. - Notes:
- Includes bibliographical references and indexes.
- Contributor:
- Shenai, Krishna.
- ISBN:
- 0890065012
- OCLC:
- 22508209