Franklin

Journal of microelectromechanical systems.

Publication:
New York, N.Y. : Institute of Electrical and Electronics Engineers, 1992-
Format/Description:
Journal/Periodical
v. : ill. ; 28 cm.
Quarterly
Vol. 1, no. 1 (Mar. 1992)-
Status/Location:
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Details

Subjects:
Electromechanical devices -- Periodicals.
Micromechanics -- Periodicals.
Microelectronics -- Periodicals.
Notes:
Title from cover.
Joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems.
Contributor:
Institute of Electrical and Electronics Engineers.
American Society of Mechanical Engineers.
Other format:
Journal of microelectromechanical systems (Online)
ISSN:
1057-7157
OCLC:
220863514