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Stress-induced phenomena in metallization : first international workshop, Ithaca, NY 1991 / editors, Che-Yu Li, Paul Totta, Paul Ho.

Publication:
New York : American Instiute of Physics, [1992]
Format/Description:
Conference/Event
Book
vii, 280 pages : illustrations ; 24 cm.
Conference Name:
International Workshop on Stress-Induced Phenomena in Metallization (1st : 1991 : Ithaca, N.Y.)
Series:
AIP conference proceedings ; no. 263.
American Vacuum Society series ; 13.
American Vacuum Society series ; 13
Conference proceedings ; no. 263
Status/Location:
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Other Title:
Stress induced phenomena in metallization : first international workshop, Ithaca, NY 1991
Subjects:
Thin film devices -- Reliability -- Congresses.
Thin film devices -- Reliability.
Thin film devices.
Integrated circuits -- Very large scale integration -- Reliability -- Congresses.
Integrated circuits -- Very large scale integration -- Reliability.
Integrated circuits -- Very large scale integration.
Metallizing -- Congresses.
Metallizing.
Form/Genre:
Conference papers and proceedings.
Conference papers and proceedings.
Notes:
"The workshop was held ... September 11-13, 1991" -- Pref.
Includes bibliographical references and index.
Contributor:
Li, Che-Yu.
Totta, Paul.
Ho, P. S.
American Institute of Physics.
ISBN:
1563960826
OCLC:
27937326