Stress-induced phenomena in metallization : first international workshop, Ithaca, NY 1991 / editors, Che-Yu Li, Paul Totta, Paul Ho.
- Publication:
- New York : American Instiute of Physics, [1992]
- Format/Description:
- Conference/Event
Book
vii, 280 pages : illustrations ; 24 cm. - Conference Name:
- International Workshop on Stress-Induced Phenomena in Metallization (1st : 1991 : Ithaca, N.Y.)
- Series:
- AIP conference proceedings ; no. 263.
American Vacuum Society series ; 13.
American Vacuum Society series ; 13
Conference proceedings ; no. 263 - Status/Location:
-
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Details
- Other Title:
- Stress induced phenomena in metallization : first international workshop, Ithaca, NY 1991
- Subjects:
- Thin film devices -- Reliability -- Congresses.
Thin film devices -- Reliability.
Thin film devices.
Integrated circuits -- Very large scale integration -- Reliability -- Congresses.
Integrated circuits -- Very large scale integration -- Reliability.
Integrated circuits -- Very large scale integration.
Metallizing -- Congresses.
Metallizing. - Form/Genre:
- Conference papers and proceedings.
Conference papers and proceedings. - Notes:
- "The workshop was held ... September 11-13, 1991" -- Pref.
Includes bibliographical references and index. - Contributor:
- Li, Che-Yu.
Totta, Paul.
Ho, P. S.
American Institute of Physics. - ISBN:
- 1563960826
- OCLC:
- 27937326