Stress-induced phenomena in metallization : first international workshop, Ithaca, NY 1991 / editors, Che-Yu Li, Paul Totta, Paul Ho.

Other Title:

Stress induced phenomena in metallization : first international workshop, Ithaca, NY 1991

Publication:

New York : American Instiute of Physics, c1992.

Conference Name:

International Workshop on Stress-Induced Phenomena in Metallization (1st : 1991 : Ithaca, N.Y.)

Series:

AIP conference proceedings ; no. 263.
American Vacuum Society series ; 13
American Vacuum Society series ; 13
Conference proceedings ; no. 263

Format/Description:

Conference/Event
Book
vii, 280 p. : ill. ; 24 cm.

Subjects:

Thin film devices -- Reliability -- Congresses.
Integrated circuits -- Very large scale integration -- Reliability -- Congresses.
Metallizing -- Congresses.

Notes:

"The workshop was held ... September 11-13, 1991" -- Pref.
Includes bibliographical references and index.

Contributor:

Li, Che-Yu.
Totta, Paul.
Ho, P. S.
American Institute of Physics.

ISBN:

1563960826

OCLC:

27937326

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