Optical diagnostics for thin film processing / Irving P. Herman.

Author/Creator:

Herman, Irving P.

Publication:

San Diego, Calif. : Academic Press, c1996.

Format/Description:

Book
xxix, 783 p. : ill. ; 24 cm.

Subjects:

Thin films -- Surfaces.
Spectrum analysis -- Industrial applications.

Notes:

Includes bibliographical references and index.

ISBN:

0123420709 (alk. paper)

OCLC:

32508558

Online:

Online access from HathiTrust during COVID-19 — only for students, active faculty, and permanent staff
http://catalog.hathitrust.org/api/volumes/oclc/32508558.html

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