Franklin

Optical diagnostics for thin film processing / Irving P. Herman.

Author/Creator:
Herman, Irving P.
Publication:
San Diego, Calif. : Academic Press, c1996.
Format/Description:
Book
xxix, 783 p. : ill. ; 24 cm.
Subjects:
Thin films -- Surfaces.
Spectrum analysis -- Industrial applications.
Notes:
Includes bibliographical references and index.
ISBN:
0123420709 (alk. paper)
OCLC:
32508558
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