Franklin

Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.

Author/Creator:
Stuart, R. V.
Publication:
New York : Academic Press, 1983.
Format/Description:
Book
viii, 151 p. : ill. ; 24 cm.
Subjects:
Vacuum technology.
Thin films.
Cathode sputtering (Plating process).
Notes:
Includes index.
ISBN:
0126747806
OCLC:
8667288
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