Franklin

Micro- and nanopatterning polymers / Hiroshi Ito, editor ... [et al.].

Publication:
Washington, DC : American Chemical Society : Distributed by Oxford University Press, c1998.
Series:
ACS symposium series, 0097-6156 ; 706
Format/Description:
Book
xii, 386 p. : ill. ; 24 cm.
Subjects:
Microelectronics -- Materials.
Polymeric composites.
Photoresists -- Materials.
Notes:
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 214th ACS National Meeting, Las Vegas, Nevada, September 7-11, 1997."
Includes bibliographical references and indexes.
Contributor:
Ito, Hiroshi.
American Chemical Society. Division of Polymeric Materials: Science and Engineering.
American Chemical Society. Meeting 1997 : Las Vegas, Nev.)
ISBN:
0841235813
OCLC:
39257282
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