Micro- and nanopatterning polymers / Hiroshi Ito, editor ... [et al.].

Publication:

Washington, DC : American Chemical Society : Distributed by Oxford University Press, c1998.

Series:

ACS symposium series, 0097-6156 ; 706

Format/Description:

Book
xii, 386 p. : ill. ; 24 cm.

Subjects:

Microelectronics -- Materials.
Polymeric composites.
Photoresists -- Materials.

Notes:

"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 214th ACS National Meeting, Las Vegas, Nevada, September 7-11, 1997."
Includes bibliographical references and indexes.

Contributor:

Ito, Hiroshi.
American Chemical Society. Division of Polymeric Materials: Science and Engineering.
American Chemical Society. Meeting 1997 : Las Vegas, Nev.)

ISBN:

0841235813

OCLC:

39257282

Online:

Online access from HathiTrust during COVID-19 — only for students, active faculty, and permanent staff
http://catalog.hathitrust.org/api/volumes/oclc/39257282.html

Loading...