Franklin

Copper-fundamental mechanisms for microelectronic applications / Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann.

Author/Creator:
Murarka, S. P.
Publication:
New York : John Wiley, 2000.
Format/Description:
Book
xxviii, 337 p. : ill. ; 24 cm.
Subjects:
Semiconductors -- Materials.
Copper.
Metallizing.
Semiconductors -- Junctions.
Microelectronics.
Notes:
Includes bibliographical references and index.
Contributor:
Verner, Igor V., 1955-
Gutmann, Ronald J.
ISBN:
0471252565 (cloth : alk. paper)
OCLC:
42296592
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