Franklin

Proceedings / sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center.

Other Title:
Micro electro mechanical systems
IEEE micro electro mechanical systems
MEMS
Publication:
New York, NY : IEEE, 2000-
Conference Name:
IEEE International Conference on Micro Electro Mechanical Systems.
Format/Description:
Conference/Event
Journal/Periodical
v. : ill. ; 28 cm.
Annual
13th (2000)-
Continues:
IEEE International Conference on Micro Electro Mechanical Systems. Technical digest
Subjects:
Electromechanical devices -- Congresses.
Microelectronics -- Congresses.
Robotics -- Congresses.
Miniature objects -- Congresses.
Contributor:
IEEE Robotics and Automation Society.
ISSN:
1084-6999
OCLC:
64250422
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