Franklin

IEEE International Symposium on Semiconductor Manufacturing conference proceedings.

Other records:
Other Title:
Proceedings of ISSM, <2000>
Publication:
Piscataway, N.J. : Institute of Electrical and Electronics Engineers, c1997-
Conference Name:
International Symposium on Semiconductor Manufacturing.
Format/Description:
Conference/Event
Journal/Periodical
v. : ill. ; 28 cm.
Biennial
1997-
Continues:
International Symposium on Semiconductor Manufacturing Proceedings
Subjects:
Semiconductors -- Design and construction -- Congresses.
Semiconductor industry -- Production control -- Congresses.
Semiconductor industry -- Management -- Congresses.
Process control -- Congresses.
Notes:
Sponsoring organizations: Ultra Clean Society, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, and the Components, Packaging and Manufacturing Technology Society, 1997-
Contributor:
IEEE Electron Devices Society.
Ultra Clean Society.
Semiconductor Equipment and Materials International.
Components, Packaging & Manufacturing Technology Society.
ISSN:
1523-553X
OCLC:
39283054
Loading...
Location Notes Your Loan Policy
Description Status Barcode Your Loan Policy