Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 / editors, David G. Seiler ... [et al.].
- Melville, NY : American Institute of Physics, 2001.
- Conference Name:
- International Conference on Characterization and Metrology for ULSI Technology (2000 : Gaithersburg, Md.)
- AIP conference proceedings ; no. 550.
AIP conference proceedings, 0094-243x ; 550
xv, 708 p. : ill. ; 28 cm. + 1 computer optical disk (4 3/4 in.)
- Integrated circuits -- Ultra large scale integration -- Congresses.
Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
- "The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology (NIST) from June 26 through June 29, 2000."--Pref.
Includes bibliographical references and indexes.
- Seiler, David G.
- 156396967X (set)
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