Franklin

MLA

Seiler, David G. Characterization and Metrology for Ulsi Technology, 2000 : International Conference, Gaithersburg, Maryland, 26-29 June 2000. Melville, NY: American Institute of Physics, 2001.

APA

Seiler, D. G. (2001). Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000. Melville, NY: American Institute of Physics.

Chicago

Seiler, David G. Characterization and Metrology for ULSI Technology, 2000: International Conference, Gaithersburg, Maryland, 26-29 June 2000. Melville, NY: American Institute of Physics, 2001.