Handbook of silicon semiconductor metrology / edited by Alain C. Diebold.

Publication:

New York : Marcel Dekker, c2001.

Format/Description:

Book
xvi, 874 p. : ill. ; 27 cm.

Subjects:

Semiconductors -- Measurement.
Semiconductors -- Inspection.

Notes:

Includes bibliographical references and index.

Contributor:

Diebold, A. C. (Alain C.)

ISBN:

0824705068 (acid-free paper)

OCLC:

46822335

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