Franklin

Handbook of silicon semiconductor metrology / edited by Alain C. Diebold.

Publication:
New York : Marcel Dekker, c2001.
Format/Description:
Book
xvi, 874 p. : ill. ; 27 cm.
Subjects:
Semiconductors -- Measurement.
Semiconductors -- Inspection.
Notes:
Includes bibliographical references and index.
Contributor:
Diebold, A. C. (Alain C.)
ISBN:
0824705068 (acid-free paper)
OCLC:
46822335
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