Franklin

Microsystem technology / W. Menz, J. Mohr, O. Paul.

Author/Creator:
Menz, W. (Wolfgang)
Publication:
Weinheim ; New York : Wiley-VCH, c2001.
Format/Description:
Book
xii, 500 p. : ill. ; 25 cm.
Status/Location:
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Details

Subjects:
Microelectronics.
Notes:
Includes bibliographical references (p. [465]-483) and index.
Contributor:
Mohr, J. (Jürgen)
Paul, Oliver.
ISBN:
3527296344
OCLC:
46516809