Franklin

MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

Author/Creator:
Hsu, Tai-Ran.
Publication:
Boston : McGraw-Hill, c2002.
Format/Description:
Book
xii, 436 p. : ill. ; 24 cm.
Subjects:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
Notes:
Includes bibliographical references (p. 427-431) and index.
ISBN:
0072393912 (alk. paper)
OCLC:
47893369
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