Franklin

Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications / edited by Krishna Seshan.

Other Title:
Handbook of thin film deposition processes and techniques
Edition:
2nd ed.
Publication:
Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.
Series:
Materials science and process technology series. Electronic materials and process technology.
Materials science and process technology series. Electronic materials and process technology
Format/Description:
Book
xxviii, 629 p. : ill. ; 24 cm.
Subjects:
Thin film devices -- Design and construction -- Handbooks, manuals, etc.
Thin films -- Handbooks, manuals, etc.
Chemical vapor deposition -- Handbooks, manuals, etc.
Notes:
Includes bibliographical references and index.
Local notes:
Acquired for the Penn Libraries with assistance from the Rosengarten Family Fund.
Contributor:
Seshan, Krishna.
Rosengarten Family Fund.
ISBN:
0815514425
OCLC:
42960492
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