Franklin

Photo-excited processes, diagnostics, and applications : fundamentals and advanced topics / edited by A. Peled.

Publication:
Dordrecht ; Boston : Kluwer Academic, c2003.
Format/Description:
Book
xv, 370 p. : ill. ; 25 cm.
Subjects:
Integrated circuits -- Design and construction.
Microtechnology -- Testing.
Microelectronics -- Materials.
Photon beams.
Photochemistry.
Notes:
Includes bibliographical references and index.
Contributor:
Peled, A. (Aaron)
ISBN:
1402075278 (alk. paper)
OCLC:
53123638
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