Franklin

Micromechanics and nanoscale effects : MEMS, multi-scale matrials [sic] and micro-flows / edited by Vasyl Michael Harik and Li-Shi Luo.

Publication:
Dordrecht ; Boston : Kluwer Academic, c2004.
Series:
ICASE/LaRC interdisciplinary series in science and engineering ; v. 10
Format/Description:
Book
xv, 240 p. : ill. ; 25 cm.
Subjects:
Microelectronics.
Microelectromechanical systems.
Actuators.
Notes:
Includes bibliographical references and index.
Contributor:
Harik, Vasyl Michael.
Luo, Li-Shi.
ISBN:
1402019688 (alk. paper)
OCLC:
54407893
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