Franklin

Integrated chemical microsensor systems in CMOS technology / A. Hierlemann.

Author/Creator:
Hierlemann, A. (Andreas)
Publication:
Berlin ; New York : Springer, c2005.
Series:
Microtechnology and MEMS, 1439-6599
Format/Description:
Book
ix, 229 p. : ill. ; 24 cm.
Subjects:
Chemical detectors.
Local subjects:
Metal oxide semiconductors, Complementary. (search)
Notes:
Includes bibliographical references ( [p.193]-217) and index.
ISBN:
3540237828 (hd.bd.)
OCLC:
59616642
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