Franklin

Electroceramic-based MEMS : fabrication-technology and applications / edited by Nava Setter.

Publication:
New York : Springer Science+Business Media, c2005.
Series:
Electronic materials: science & technology.
The Kluwer international series in: Electronic materials: science and technology ; 9
Format/Description:
Book
xii, 414 p. : ill. ; 25 cm.
Subjects:
Microelectromechanical systems.
Notes:
Includes bibliographical references and index.
Contributor:
Setter, N. (Nava), 1949-
ISBN:
0387233105
OCLC:
56527238
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