The production of epitaxial strained silicon on silicon germanium via ultra high vacuum chemical vapor deposition / Jerry Keybl, Bijal H. Shah, David C. Young.

Author/Creator:

Keybl, Jerry.

Publication:

2005.

Series:

Chemical engineering senior design project ; 05-4

Format/Description:

Book
74 p., [72] leaves of plates : ill., facsims. ; 29 cm.

Notes:

Advisors: Prof. Talid R. Sinno.
Includes bibliographical references.

Contributor:

Shah, Bijal H.
Young, David C.
University of Pennsylvania. Dept. of Chemical Engineering.

OCLC:

249507387

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