Franklin

The production of epitaxial strained silicon on silicon germanium via ultra high vacuum chemical vapor deposition / Jerry Keybl, Bijal H. Shah, David C. Young.

Author/Creator:
Keybl, Jerry.
Publication:
2005.
Series:
Chemical engineering senior design project ; 05-4
Format/Description:
Book
74 p., [72] leaves of plates : ill., facsims. ; 29 cm.
Notes:
Advisors: Prof. Talid R. Sinno.
Includes bibliographical references.
Contributor:
Shah, Bijal H.
Young, David C.
University of Pennsylvania. Dept. of Chemical Engineering.
OCLC:
249507387
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