Franklin

MEMS : introduction and fundamentals : the MEMS handbook / edited by Mohamed Gad-El-Hak.

Edition:
2nd ed.
Publication:
Boca Raton : CRC Press/Taylor & Francis, 2006.
Series:
Mechanical engineering series (Boca Raton, Fla.)
Mechanical engineering series
Format/Description:
Book
1 v. (various pagings) : ill. (some col.) ; 27 cm.
Subjects:
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
Notes:
Includes bibliographical references and index.
Contributor:
Gad-el-Hak, Mohamed, 1945-
ISBN:
0849391377 (alk. paper)
OCLC:
60543321
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