Franklin

Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li.

Publication:
Hoboken, N.J. : Wiley-Interscience, c2008.
Format/Description:
Book
xxv, 734 p. : ill. ; 25 cm.
Status/Location:
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Details

Subjects:
Integrated circuits -- Design and construction.
Chemical mechanical planarization.
Microelectronics -- Materials.
Notes:
Includes bibliographical references and index.
Local notes:
Acquired for the Penn Libraries with assistance from the Louis A. Duhring Fund.
Contributor:
Li, Yuzhuo.
Louis A. Duhring Fund.
ISBN:
9780471719199
0471719196
OCLC:
123349971