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Frontiers of characterization and metrology for nanoelectronics [electronic resource] : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009 / editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards & Technology ... [et al.].

Publication:
Melville, N. Y. : AIP Conference Proceedings, 2009.
Format/Description:
Conference/Event
Book
1 online resource (xii, 394p.) : digital, PDF, ill. (some col.).
Conference Name:
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (2009 : Albany, N.Y.)
Series:
AIP conference proceedings; v. 1173.
AIP conference proceedings ; 1173

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Details

Other Title:
Characterization and metrology for ULSI technology.
Subjects:
Integrated circuits -- Ultra large scale integration -- Congresses.
Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
Notes:
Title from PDF cover page (viewed October 26, 2009).
"All papers have been peer-reviewed."
Previous conferences entitled: Characterization and metrology for ULSI technology.
Includes bibliographical references and indexes.
Contributor:
Seiler, David G. , Editor
National Institute of Standards & Technology.
ISBN:
9780735407121
0735407126
OCLC:
459810138
Access Restriction:
Restricted for use by site license.