Franklin

Materials aspects of x-ray lithography [electronic resource] : symposium held April 12-14, 1993, San Francisco, California, U.S.A. / editors, George K. Celler, Juan R. Maldonado.

Publication:
Pittsburgh, Pa. : Materials Research Society, 1993.
Format/Description:
Book
1 online resource (xi, 291 p.) : ill.
Series:
Materials Research Society symposia proceedings ; 0272-9172 v. 306.
Materials Research Society symposia proceedings

Options
Location Notes Your Loan Policy

Details

Subjects:
X-ray lithography -- Congresses.
System Details:
Mode of access: World Wide Web.
Notes:
Papers based on the symposium on Materials Aspects of X-Ray Lithography, held in San Francisco, California, on April 12-14, 1993.
Includes bibliographical references and indexes.
Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010.
Description based on print version record.
Contributor:
Celler, George K.
Maldonado, Juan R.
Materials Research Society.
Materials Research Society. Meeting (1993 : San Francisco, Calif.). Symposium K.
Other format:
Print version: Materials aspects of x-ray lithography.
ISBN:
1558992022
9781558992023
OCLC:
621275314
Access Restriction:
Restricted for use by site license.