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Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. / editors, R.E. Howard ... [et al.].

Publication:
Pittsburgh, Pa. : Materials Research Society, c1987.
Format/Description:
Conference/Event
Book
xvii, 373 p. : ill. ; 24 cm.
Conference Name:
Symposium on the Science and Technology of Microfabrication (1986 : Boston, Mass.)
Series:
Materials Research Society symposia proceedings. 0272-9172 ; v. 76
Status/Location:
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Details

Subjects:
Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.
Notes:
Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.
Includes bibliographies and indexes.
Contributor:
Howard, R. E. (Richard Edwin), 1948-
Materials Research Society. Meeting. (1986 : Boston, Mass.)
ISBN:
0931837421
OCLC:
15488001