22nd European Mask and Lithography Conference : 23-26 January 2006.
- New York : IEEE, 2011.
- Conference Name:
- European Mask and Lithography Conference (22nd : 2006 : Dresden, Germany)
1 online resource (175 pages)
- Microlithography -- Congresses.
Integrated circuits -- Masks -- Congresses.
- Description based on: online resource; title from title screen (IEEE Xplore Digital Library, viewed March 20, 2018).
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