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IEEE/SEMI International Semiconductor Manufacturing Science Symposium : [proceedings].

Other records:
Other Title:
IEEE/SEMI International Symposium Semiconductor Manufacturing Science (ISMSS)
Semiconductor Manufacturing Science (ISMSS), IEEE/SEMI International Symposium
IEEE SEMI International Semiconductor Manufacturing Science Symposium
International Semiconductor Manufacturing Science Symposium
Proceedings
ISMSS International Semiconductor Manufacturing Science Symposium
ISMSS proceedings
Semiconductor Manufacturing Science
Publication:
New York, NY : Institute of Electrical and Electronics Engineers, c1989-c1993.
Conference Name:
IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
Format/Description:
Conference/Event
Journal/Periodical
5 v. : ill. ; 28 cm.
Annual
1989-1993.
Subjects:
Semiconductors -- Design and construction -- Congresses.
Semiconductor industry -- Production control -- Congresses.
Semiconductor industry -- Management -- Congresses.
Process control -- Congresses.
Process control.
Semiconductor industry -- Management.
Semiconductor industry -- Production control.
Semiconductors -- Design and construction.
Form/Genre:
Conference papers and proceedings.
Notes:
Some vols. lack numerical designation.
Contributor:
Institute of Electrical and Electronics Engineers.
Semiconductor Equipment and Materials International.
ISSN:
1074-6935
OCLC:
20462502
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