Franklin

Physics of radio-frequency plasmas [electronic resource] / Pascal Chabert, Nicholas Braithwaite.

Author/Creator:
Chabert, Pascal, 1969-
Publication:
Cambridge ; New York : Cambridge University Press, 2011.
Format/Description:
Book
1 online resource (395 p.)
Subjects:
Low temperature plasmas.
Radio frequency.
Form/Genre:
Electronic books.
Language:
English
Summary:
Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.
Contents:
Cover; Half-title; Title; Copyright; Contents; Acknowledgements; 1 Introduction; 2 Plasma dynamics and equilibrium; 3 Bounded plasma; 4 Radio-frequency sheaths; 5 Single-frequency capacitively coupled plasmas; 6 Multi-frequency capacitively coupled plasmas; 7 Inductively coupled plasmas; 8 Helicon plasmas; 9 Real plasmas; 10 Electrical measurements; Appendix: Solutions to exercises; References; Index
Notes:
Description based upon print version of record.
Includes bibliographical references and index.
Contributor:
Braithwaite, Nicholas (Nicholas St. J.)
ISBN:
0-511-86173-7
1-107-21696-6
1-283-00610-3
9786613006103
0-511-85666-0
0-511-86014-5
0-511-85927-9
0-511-86101-X
0-511-85840-X
0-511-97434-5
0-511-85753-5
OCLC:
703137539
Loading...
Location Notes Your Loan Policy
Description Status Barcode Your Loan Policy