Franklin

Ionized-Cluster Beam Deposition and Epitaxy

Author/Creator:
Takagi, Toshinori Author
Publication:
[Place of publication not identified] Noyes Publications Imprint 1989
Format/Description:
Book
Subjects:
Thin film devices -- Design and construction.
Epitaxy.
Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
ISBN:
0-8155-1817-X
1-59124-107-3
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