Franklin

IEEE International Symposium on Semiconductor Manufacturing conference proceedings.

Other records:
Publication:
Piscataway, N.J. : Institute of Electrical and Electronics Engineers, c1997-
Conference Name:
International Symposium on Semiconductor Manufacturing.
Format/Description:
Conference/Event
Journal/Periodical
v. : ill. ; 28 cm.
Annual, 1999-
1997-
Subjects:
Semiconductors -- Design and construction -- Congresses.
Semiconductor industry -- Production control -- Congresses.
Semiconductor industry -- Management -- Congresses.
Process control -- Congresses.
Process control.
Semiconductor industry -- Management.
Semiconductor industry -- Production control.
Semiconductors -- Design and construction.
Form/Genre:
Conference papers and proceedings.
Notes:
Sponsoring organizations: Ultra Clean Society, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, and the Components, Packaging and Manufacturing Technology Society, 1997-
Latest issue consulted: 2008.
Contributor:
IEEE Electron Devices Society.
Ultra Clean Society.
Semiconductor Equipment and Materials International.
Components, Packaging & Manufacturing Technology Society.
Constituent Unit:
1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314)
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)
OCLC:
39283054
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