Microfabrication for industrial applications [electronic resource] / Regina Luttge.

Luttge, Regina.
1st edition
Oxford ; Waltham, MA : William Andrew, 2011.
Micro and Nano Technologies
Micro and Nano Technologies
1 online resource (313 p.)
Manufacturing processes.
Electronic books.
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This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) mater
Front Cover; Microfabrication forIndustrial Applications; Copyright; Table of Contents; Preface; Author Biography; Chapter 1 Introduction; 1.1 Philosophy of Micro/Nanofabrication; 1.2 The Industry-Science Dualism; 1.3 Industrial Applications; 1.4 Purpose and Organization of this Book; References; Chapter 2 Basic Technologies for Microsystems; 2.1 Photolithography; 2.2 Thin Films; 2.2.1 Wet Deposition Techniques; 2.2.2 Vapor Deposition Techniques; 2.3 Silicon Micromachining; 2.3.1 Etching; Wet Chemical Etching; Dry Etching; 2.3.2 Surface Micromachining; 2.3.3 Silicon Bulk Micromachining
Anisotropic Wet Chemical EtchingBosch Process; 2.4 Industrially Established Non-Silicon Processing; 2.4.1 Quartz Etching; 2.4.2 Glass Wet Etching; 2.4.3 Photostructurable Glass; 2.4.4 Powder Blasting; 2.4.5 Plastic Microfabrication; Thick Resist Lithography; Laser Ablation; Photopolymerization; Thermoplastic Micromolding; 2.5 Conclusions; References; Chapter 3 Advanced Microfabrication Methods; 3.1 LIGA; 3.2 Deep Reactive Ion Etching; 3.3 Micro-Ceramic Processing; 3.3.1 Micromolding; 3.3.2 Ceramic Microparts by LIGA; 3.3.3 Utilizing Capillaries for Ceramic Micromolding
3.3.4 Utilizing Soft-Mold Replication3.3.5 Ceramic Patterning on Curved Substrates; 3.3.6 Patterning Ceramic Materials at Nanoscale Resolution; 3.4 Speciality Substrates; 3.4.1 Silicon-on-Insulator (SOI); 3.4.2 Electro-Optic Substrates; 3.5 Advanced Non-Silicon and Silicon Hybrid Devices; 3.5.1 Nanofabrication of Information Storage Devices; 3.5.2 Integrated Optics; 3.6 Planar Lightwave Circuits; 3.7 Fabrication Example of an Integrated Optical Device; 3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study; 3.9 Conclusions; References; Chapter 4 Nanotechnology
4.1 Top-Down, Bottom-Up4.1.1 Nanolithography; 4.1.2 Introduction to the Need for New Lithographic Techniques; 4.1.3 Nanolithographic Techniques; 4.1.4 Top-Down Nanolithographic Principles; 4.1.5 Nanolithographic Technologies for the Microelectronics Industry; Deep Ultraviolet (DUV) Lithography; Extreme Ultraviolet (EUV) Lithography; 4.1.6 Nanoimprint Technology; 4.1.7 Case Studies: Nanoimprint Applications; Patterned Magnetic Media; Random Access Memory; Surface-Acoustic-Wave Devices; 4.1.8 Emerging Nanolithographic Technologies; Multiple E-Beam/Ion-Beam Lithography; Templated Nanoarrays
4.1.9 Nanolithography in R&DDUV Interference Nanolithography; EUV Interference Nanolithography; Atom Lithography; 4.1.10 LIL Development at MESA+ NanoLab NL; Multi-exposures and Novel Resist Systems for 266 nm LIL; 4.1.11 Case Study: Laser Interference Lithography Nanoarraysfor Cell Biology; 4.1.12 Concluding Remarks on Emerging Nanolithography; 4.2 Nanomaterials; 4.2.1 Ordered Oxides; 4.2.2 Oxide Nanoarrays: Definitions and Background; Natural versus Artificial Oxide Nanoarrays; Oxide Metamaterials: How Do They Differ from Nanoarrays?; Curiosity-Driven Research on Nanoscale Metamaterials
Application-Driven Research on Nanoscale Oxide Metamaterials
Description based upon print version of record.
Includes bibliographical references and index.
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