Franklin

Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 192, San Francisco, California, U.S.A. / editors, Robert J. Nemanich ... [et. al.]. [electronic resource]

Publication:
Pittsburgh, Pa. : Materials Research Society, 1992.
Series:
Materials Research Society symposia proceedings ; v. 259.
Materials Research Society symposium proceedings ; v. 259
Format/Description:
Book
1 online resource (529 p. ) illus. ;
Subjects:
Semiconductors -- Congresses.
Crystal growth -- Congresses.
Surface preparation -- Congresses.
Form/Genre:
Conference proceedings.
Electronic books
Notes:
Includes bibliographical references and index.
Contributor:
Hirose, Masataka.
Helms, C. Robert.
Nemanich, R. J. (Robert J.)
Rubloff, G. W. (Gary W.)
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