Franklin

20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany

Author/Creator:
European Conference on Mask Technology for Integrated Circuits and Microcomponents Corporate Author
Publication:
[Place of publication not identified] SPIE 2004
Series:
SPIE proceedings series 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Format/Description:
Book
Subjects:
Integrated circuits -- Masks -- Congresses.
Microlithography -- Congresses.
Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
Contributor:
Behringer, Uwe F. W Contributor
Forschungszentrum Karlsruhe Content Provider
Society of Photo Optical Instrumentation Engineers Content Provider
VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik Content Provider
Loading...
Location Notes Your Loan Policy
Description Status Barcode Your Loan Policy