Franklin

Fundamentals of laser assisted micro- and nanotechnologies : 25-28 June 2007, St. Petersburg, Russia / Vadim P. Veiko, editor ; organized by St. Petersburg State University of Information Technologies, Mechanics and Optics (Russia), General Physics Institute of Russian Academy of Sciences [and] S.I. Vavilov State Optical Institute (Russia) ; sponsored by Russian Federation Ministry of Education and Science ... [et al.] ; published by SPIE.

Publication:
[Place of publication not identified] SPIE 2008
Format/Description:
Book
Series:
Proceedings of SPIE Fundamentals of laser assisted micro- and nanotechnologies
Status/Location:
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