Franklin

MEMS/MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium

Other Title:
MEMS/MOEMS
Publication:
[Place of publication not identified] SPIE 2003
Series:
Proceedings of SPIE MEMS/MOEMS
Format/Description:
Book
Subjects:
Microelectromechanical systems -- Technological innovations -- Congresses.
Optoelectronic devices -- Design and construction -- Congresses.
Optical communications -- Technological innovations -- Congresses.
Microelectronic packaging -- Technological innovations -- Congresses.
Mechatronics -- Congresses.
Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
Contributor:
Behringer, Uwe F. W Contributor
Society of Photo-optical Instrumentation Engineers Content Provider
Society of Photo Optical Instrumentation Engineers Content Provider
European Optical Society Content Provider
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