Franklin

Dimensional Optical Metrology and Inspection for Practical Applications

Author/Creator:
Harding, Kevin Author
Publication:
[Place of publication not identified] SPIE 2011
Format/Description:
Book
Status/Location:
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Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
Contributor:
Yoshizawa, Toru Contributor
Huang,Peisen Contributor