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Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI : 13-14 August 2012, San Diego, California, United States

Author/Creator:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors (Conference) Corporate Author
Publication:
[Place of publication not identified] SPIE 2012
Format/Description:
Conference/Event
Book
Conference Name:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors (Conference)
Series:
Proceedings of SPIE Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
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Subjects:
Nanostructured materials -- Congresses.
Microfabrication -- Congresses.
Nanotechnology -- Congresses.
Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
Contributor:
Postek, Michael T Contributor
Postek, Michael T Editor
Coleman, Victoria Anne Contributor
Coleman, Victoria Anne Editor
Orji, Ndubuisi George Editor
SPIE (Society) Content Provider