MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA
- Publication:
- [Place of publication not identified] SPIE 2005
- Format/Description:
- Book
- Series:
- SPIE proceedings series MOEMS and miniaturized systems V
- Status/Location:
-
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Details
- Subjects:
- Microelectromechanical systems -- Congresses.
Miniature electronic equipment -- Congresses.
Micromechanics -- Congresses.
Optics, Adaptive -- Congresses.
Optical scanners -- Congresses. - Language:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- Contributor:
- El-Fatatry, Ayman Contributor
El-Fatatry, Ayman. Contributor
Society of Photo-optical Instrumentation Engineers Content Provider
Sandia National Laboratories Content Provider
Semiconductor Equipment and Materials International Content Provider
Solid State Technology (Organization) Content Provider
Society of Photo Optical Instrumentation Engineers Content Provider