Franklin

Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California

Publication:
[Place of publication not identified] SPIE International Society for Optical Engineering 1985
Format/Description:
Book
Series:
Proceedings of SPIE--the International Society for Optical Engineering Micron and submicron integrated circuit metrology
Status/Location:
Loading...

Options
Location Notes Your Loan Policy

Details

Subjects:
Integrated circuits -- Measurement -- Congresses.
Integrated circuits -- Testing -- Congresses.
Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
Contributor:
Monahan, Kevin M Contributor
University of Rochester Institute of Optics. Content Provider
Society of Photo Optical Instrumentation Engineers Content Provider
University of Arizona Optical Sciences Center. Content Provider