Franklin

Microlithography and metrology in micromachining III : 29-30 September, 1997, Austin, Texas

Publication:
[Place of publication not identified] SPIE 1997
Series:
Proceedings / SPIE--the International Society for Optical Engineering Microlithography and metrology in micromachining III
Format/Description:
Book
Subjects:
Micromachining -- Congresses.
Microlithography -- Congresses.
Measurement -- Congresses.
Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
Contributor:
Umeda, Akira Contributor
Friedrich, Craig Contributor
Society of Photo Optical Instrumentation Engineers Content Provider
National Institute of Standards and Technology (U.S.) Content Provider
Semiconductor Equipment and Materials Institute Content Provider
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