Franklin

Modeling aspects in optical metrology IV : 13-14 May 2013, Munich, Germany / Bernd Bodermann, Karsten Frenner, Richard M. Silver, editors ; sponsored by SPIE.

Publication:
Bellingham, Washington : SPIE, 2013.
Format/Description:
Book
1 online resource (400 pages).
Series:
Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 8789.
Proceedings of SPIE ; Volume 8789
Status/Location:
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Details

Subjects:
Optical measurements -- Congresses.
Integrated circuits -- Congresses.
Form/Genre:
Electronic books.
Notes:
Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 20, 2018).
Contributor:
Bodermann, Bernd, editor.
Frenner, Karsten, editor.
Silver, Richard M., editor.
Society of Photo-optical Instrumentation Engineers, sponsoring body.