Franklin

MOEMS and miniaturized systems VI : 24-25 January 2007, San Jose, California, USA

Publication:
[Place of publication not identified] SPIE 2007
Series:
Proceedings of SPIE MOEMS and miniaturized systems VI
Format/Description:
Book
Subjects:
Microelectromechanical systems -- Congresses.
Miniature electronic equipment -- Congresses.
Micromechanics -- Congresses.
Optical scanners -- Congresses.
Language:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
Contributor:
Dickensheets, David L Contributor
Gogoi, Bishnu P Contributor
Schenk, Harald Contributor
Society of Photo Optical Instrumentation Engineers Content Provider
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