Franklin

Workshop on mass flow measurement and control for the semiconductor industry / Robert F. Berg, David S. Green, George E. Mattingly.

Author/Creator:
Berg, Robert F, author
Publication:
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2001.
Series:
NIST special publication ; 400-101.
NIST special publication ; 400-101
Format/Description:
Government document
Book
1 online resource.
Notes:
2001.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references.
Contributor:
Berg, Robert F.
Green, David S.
Mattingly, George E.
National Institute of Standards and Technology (U.S.)
OCLC:
927169870
Publisher Number:
GOVPUB-C13-8c4c29a3b18166d326b052eec1974771
Access Restriction:
Open Access Unrestricted online access star
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