Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / Warren K. Gladden, Stephen R. Slaughter, Walter M. Duncan, Aslan Baghdadi.
- Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1988.
- Format/Description:
- Government document
Book
1 online resource. - Series:
- NIST special publication ; 400-81.
NIST special publication ; 400-81 - Status/Location:
-
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Details
- Notes:
- 1988.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references. - Contributor:
- Baghdadi, A.
Duncan, Walter M.
Gladden, Warren K.
Slaughter, Stephen R.
National Institute of Standards and Technology (U.S.) - OCLC:
- 927169698
- Publisher Number:
- GOVPUB-C13-f13459a98a436bc16d5c31ff972e60b3
- Access Restriction:
- Open Access Unrestricted online access star