Franklin

Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / Warren K. Gladden, Stephen R. Slaughter, Walter M. Duncan, Aslan Baghdadi.

Author/Creator:
Gladden, Warren K. author
Publication:
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1988.
Format/Description:
Government document
Book
1 online resource.
Series:
NIST special publication ; 400-81.
NIST special publication ; 400-81
Status/Location:
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Details

Notes:
1988.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references.
Contributor:
Baghdadi, A.
Duncan, Walter M.
Gladden, Warren K.
Slaughter, Stephen R.
National Institute of Standards and Technology (U.S.)
OCLC:
927169698
Publisher Number:
GOVPUB-C13-f13459a98a436bc16d5c31ff972e60b3
Access Restriction:
Open Access Unrestricted online access star