Franklin

A FORTRAN program for analysis of data from microelectronic test structures / Richard L. Mattis, Martin G. Buehler.

Author/Creator:
Mattis, Richard L. author
Publication:
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1983.
Series:
NBS special publication ; 400-75.
NBS special publication ; 400-75
Format/Description:
Government document
Book
1 online resource.
Notes:
1983.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references.
Contributor:
Buehler, Martin G.
Mattis, Richard L.
United States. National Bureau of Standards.
OCLC:
927169342
Publisher Number:
GOVPUB-C13-4a5de3150f56866892dbe9c0d1438d3e
Access Restriction:
Open Access Unrestricted online access star
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