Franklin

Detection of phosphorus in epitaxial silicon by EPR / Te-Tse Chang.

Author/Creator:
Chang, Te-Tse., author
Publication:
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1979.
Format/Description:
Government document
Book
1 online resource.
Series:
NBSIR ; 79-1748.
NBSIR ; 79-1748
Status/Location:
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Details

Notes:
1979.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references.
Contributor:
Chang, Te-Tse.
United States. National Bureau of Standards.
OCLC:
935499006
Publisher Number:
GOVPUB-C13-980a4fcd7ba6638af9906b2d1c39fddc
Access Restriction:
Open Access Unrestricted online access star