Detection of phosphorus in epitaxial silicon by EPR / Te-Tse Chang.
- Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1979.
- Format/Description:
- Government document
Book
1 online resource. - Series:
- NBSIR ; 79-1748.
NBSIR ; 79-1748 - Status/Location:
-
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Details
- Notes:
- 1979.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references. - Contributor:
- Chang, Te-Tse.
United States. National Bureau of Standards. - OCLC:
- 935499006
- Publisher Number:
- GOVPUB-C13-980a4fcd7ba6638af9906b2d1c39fddc
- Access Restriction:
- Open Access Unrestricted online access star