Franklin
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LEADER 01311aam a2200349Ii 4500
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20201201174019.0
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m o d
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008
160606s1986 mdu ot f000 0 eng d
001
9977873045603681
024
8
a| GOVPUB-C13-6c392f7831163d780640a7a1e7b214ad
035
a| (OCoLC)951215411
040
a| NBS
b| eng
e| pn
e| rda
c| NBS
d| GPO
074
a| 0247-D (online)
086
0
a| C 13.58:86-3464
090
a| QC100
b| .U56 no.86-3464 1986
100
1
a| Walters, Jane,
e| author
245
1
0
a| Semiconductor measurement technology :
b| a bibliography of NBS publications for the years 1962-1985 /
c| Jane Walters.
264
1
a| Gaithersburg, MD :
b| U.S. Dept. of Commerce, National Institute of Standards and Technology,
c| 1986.
300
a| 1 online resource.
336
a| text
2| rdacontent
337
a| computer
2| rdamedia
338
a| online resource
2| rdacarrier
490
1
a| NBSIR ;
v| 86-3464
500
a| 1986.
500
a| Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
500
a| Title from PDF title page.
504
a| Includes bibliographical references.
506
0
a| Open Access
f| Unrestricted online access
2| star
700
1
a| Walters, Jane.
710
2
a| United States.
b| National Bureau of Standards.
830
0
a| NBSIR ;
v| 86-3464.