Semiconductor microelectronics and nanoelectronics programs / Stephen Knight; Joaquin V. Martinez de Pinillos; Yaw S. Obeng; Michele Buckley.
- Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2008.
- Format/Description:
- Government document
Book
1 online resource. - Series:
- NISTIR ; 7513.
NISTIR ; 7513 - Status/Location:
-
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Details
- Notes:
- 2008.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references. - Contributor:
- Buckley, Michele.
Pinillos, Joaquin V. Martinez de.
Knight, Stephen.
Obeng, Yaw S.
National Institute of Standards and Technology (U.S.) - OCLC:
- 947049555
- Publisher Number:
- GOVPUB-C13-44e8840a54cd70c03a35afa4a9612ad9
- Access Restriction:
- Open Access Unrestricted online access star