Franklin

Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.

Publication:
Sharjah, United Arab Emirates ; Oak Park, Illinois : Bentham Science Publishers, [2013]
Format/Description:
Book
1 online resource (363 p.)
Status/Location:
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Details

Subjects:
Thin films.
Metals.
Form/Genre:
Electronic books.
Language:
English
Summary:
This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
Contents:
Cover; Title; Contents; About the Editors; Foreword; Preface; List of Contributors; Part 1; Chapter 01; Chapter 02; Chapter 03; Part 2; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Chapter 08; Part 3; Chapter 09; Chapter 10; Chapter 11; Chapter 12; Author index; Subject index
Notes:
Description based upon print version of record.
Includes bibliographical references and indexes.
Description based on online resource; title from PDF title page (ebrary, viewed September 20, 2013).
Contributor:
Vaz, Filipe.
Martin, Nicolas.
Fenker, Martin.
ISBN:
1-60805-156-0
OCLC:
854975260