Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.
- Publication:
- Sharjah, United Arab Emirates ; Oak Park, Illinois : Bentham Science Publishers, [2013]
- Format/Description:
- Book
1 online resource (363 p.) - Status/Location:
-
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Details
- Subjects:
- Thin films.
Metals. - Form/Genre:
- Electronic books.
- Language:
- English
- Summary:
- This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
- Contents:
- Cover; Title; Contents; About the Editors; Foreword; Preface; List of Contributors; Part 1; Chapter 01; Chapter 02; Chapter 03; Part 2; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Chapter 08; Part 3; Chapter 09; Chapter 10; Chapter 11; Chapter 12; Author index; Subject index
- Notes:
- Description based upon print version of record.
Includes bibliographical references and indexes.
Description based on online resource; title from PDF title page (ebrary, viewed September 20, 2013). - Contributor:
- Vaz, Filipe.
Martin, Nicolas.
Fenker, Martin. - ISBN:
- 1-60805-156-0
- OCLC:
- 854975260